Quartz Wafer Ntxuav Nkoj
Lub quartz wafer tu nkoj yog ib qho cuab yeej siv rau kev tu wafer hauv cov txheej txheem tsim khoom semiconductor.
Khoom siv: 99.99% quartz
Hauj lwm lawm
Nta
- Kub kub kuj
- Corrosion kuj
- Hnav tsis kam
- Yooj yim ntxuav
Siv: tshem tawm cov kab mob saum npoo av
Xyuas kom cov khoom zoo ntawm semiconductor chips.
Daim ntawv thov
1. Ua ntej-Diffusion Cleaning
Siv los thauj cov wafers los ntawm lub rooj zaum ntub dej los yog kev ntxuav cov kauj ruam (piv txwv li, RCA tu) kom tshem tawm cov organic, nws yog xim hlau, thiab cov khoom tsis huv ua ntej siab - kub diffusion lossis oxidation txheej txheem.
2. Tom qab-CMP (Chemical Mechanical Planarization) Kev Tu
Tuav wafers thaum lub sij hawm tom qab- polishing cleans kom tshem tawm slurry residues thiab defects nto, kom ntseeg tau tias zoo flatness rau lithography cov kauj ruam tom ntej.
3. Pem hauv ntej-End- ntawm-Kab (FEOL) Fabrication
Ua haujlwm nyob rau hauv FEOL tu theem tseem ceeb uas yuav tsum muaj qhov chaw huv huv ultra- rau lub qhov rooj oxide kev loj hlob, epitaxial deposition, los yog ion implantation.
4. Rov qab-End- ntawm-Kab (BEOL) Kev Ua Haujlwm
Txhawb wafers thaum lub sij hawm xa ntawv -etch lossis post- tshem tawm kev tshem tawm photoresist, etch byproducts, thiab metallic impurities tom qab sib txuas tsim.
5. Advanced Ntim
Ua kom yooj yim rau wafer-theem tu ua ntej dicing los yog bonding nyob rau hauv 2.5D / 3D IC ntim, kom ntseeg tau cov kab mob sib kis-dawb interfaces rau kev txhim khu kev qha interconnects.
6. Kev tsim hluav taws xob photovoltaic
Siv nyob rau hauv lub hnub ci cell ntau lawm los ntxuav silicon substrates, txhim kho nto zoo rau kev txhim kho lub teeb haum thiab lub zog conversion efficiency.
Cov khoom
|
Lub cev muaj zog |
Tus nqi |
|
Purity |
＞99.99% |
|
Qhov ntom |
2.2g / cm33 |
|
Pob tshab |
＞90% |
|
Mohs Hardness |
5.5--6.5 |
|
Deformation Point |
1280 degree |
|
Softening Point |
1750 degree |
|
Annealing Point |
1250 degree |
|
Thaum tshav kub kub tshwj xeeb (20 - 350 degree) |
670 J/kg degree |
|
Thermal conductivity (20 degree) |
1.4 W / m degree |
|
Thaum tshav kub kub conductivity (w / mk, 1000 degree) |
1.0-1.2 |
|
Refractive Index |
1.4585 |
|
Coefficient ntawm Thermal Expansion |
5.510 -7cm / hli. degree |
|
Kub - Ua haujlwm Kub |
1750-2050 degree |
|
Luv - Lub Sijhawm Kev Pabcuam Kub |
1450 degree |
|
Ntev - Lub Sijhawm Kev Pabcuam Kub |
1100 degree |
|
Chemical Properties |
Tus nqi |
|
Acid resistant |
Muaj zog Acid (tshwj tsis yog HF), Muaj zog alkali, organic tov |
|
Kub kub Corrosion resistant |
Zoo heev |
|
Hlau impurity ntsiab lus |
5 ppm |
|
Cov khoom hluav taws xob |
Tus nqi |
|
Kev tiv thaiv |
7107Ω cm |
|
Rwb thaiv tsev muaj zog |
250 ~ 400 kW/cm |
|
Dielectric tsis tu ncua |
3.7~3.9 |
|
Dielectric Absorption Coefficient |
＜410-4 |
|
Dielectric Loss Coefficient |
＜110-4 |
|
Mechanical Properties |
Tus nqi |
|
Compressive zog |
1100MPa |
|
Khoov zog |
67mpa ua |
|
Tensile zog |
48MPa ua |
|
Poisson tus ratio |
0.14~0.17 |
|
Young's Modulus |
72000 MPa |
|
Shear Modulus |
31000MPa |
Txoj kev ntxuav
Immersion ntxuav:
Muab lub wafer tso rau hauv lub nkoj ntxuav, ces muab tso rau hauv lub nkoj ntxuav hauv cov kua ntxuav, thiab ua kom muaj kev sib cuag ntawm cov kua ntxuav thiab cov wafer nto los ntawm kev nqa lub nkoj wafer los txhim kho cov nyhuv tu.
Txau ntxuav:
Sawv ntsug lub nkoj ntxuav ncaj nraim hauv chav tshuaj tsuag, thiab siv lub nozzle los txau cov kua ntxuav ntawm lub wafer nto kom tshem tawm cov kab mob. ua
Qhov tseem ceeb ntawm kev tu lub nkoj:
- Xyuas kom huv huv wafer: Lub wafer huv si yog qhov tseem ceeb rau kev tsim khoom zoo ntawm semiconductor chips, thiab lub nkoj ntxuav ua lub luag haujlwm tseem ceeb hauv kev ntxuav.
- Xyuas kom muaj kev ntseeg siab ntawm semiconductor chips: Ua kom muaj kev ntseeg siab ntawm cov chips thiab txo cov khoom tsis xws luag los ntawm kev tshem tawm cov khoom paug.
- Txhim kho cov txiaj ntsig ntawm semiconductor chips: Txhim kho qhov huv ntawm wafers, yog li txhim kho cov txiaj ntsig ntawm semiconductor chips.
Cim npe nrov: Tuam Tshoj quartz wafer tu nkoj, Tuam Tshoj quartz wafer tu nkoj manufacturers, lwm tus neeg, Hoobkas
Xa kev nug
Koj Tseem Yuav Zoo Li
